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Catalog No. | GR0976 |
Size | <40cm (15") |
Material | Graphite, with CVD SiC coating |
Purity | >99.99% for SiC coating |
Surface | Zero porosity |
Coating thickness | 50~500um |
Stanford Advanced Materials provide full range of CVD material, such as Silicon Carbide(SiC) coated and PBN coated products. As the graphite body is an machinable material, we can coated trays with various shapes and provide custom manufacturing service for semiconductor industries and applications require high temperature and high purity.
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