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GR0976 Silicon Carbide Coated Graphite Trays

Catalog No. GR0976
Size <40cm (15")
Material Graphite, with CVD SiC coating
Purity >99.99% for SiC coating
Surface Zero porosity
Coating thickness 50~500um

Stanford Advanced Materials provide full range of CVD material, such as Silicon Carbide(SiC) coated and PBN coated products. As the graphite body is an machinable material, we can coated trays with various shapes and provide custom manufacturing service for semiconductor industries and applications require high temperature and high purity.

 

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