PBN/PG Composite Heating Elements Description
Pyrolytic Boron Nitride is used as the substrate for the PBN heating element. Pyrolytic Graphite(PG) is placed on the surface of PBN plates by the CVD method as a conductor and heater. Depending on the different requirements of applications, the PG heating element could be covered by PBN again or just stay open.
As both PG and PBN are extremely pure (99.99% or even higher) and very stable in a vacuum or inert atmosphere, the PBN/PG Composite Heating Elements could be very durable and keep the chamber clean. It could be heated to 1600℃ in a very short time without the emission of any gas component. It also has good resistance to acid and alkali. These heating elements are ideal products for the semiconductor industry and applications that require high temperature, high vacuum, and high purity.
PBN/PG Composite Heating Elements Specifications
Diameter:
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0.5"~4", or customized
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Bulk Density
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2.0-2.19g/cm3
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Max. Working Temperature (vacuum)
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2400℃
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Volume Resistivity (Ω·cm)
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3.11*1011
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Flexural Strength (Mpa)
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243.63
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Thermal Conductivity (W/M·k)
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43-60
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Customized Service:
Shape
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Wafer
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Rectangle
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Tube
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Size (mm)
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φ380 MAX
1.0-2.5
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265*265 MAX
1.0-2.5
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φ265 MAX
400 MAX Length
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Sample
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PBN/PG Composite Heating Elements Applications
- Semiconductor substrate heater (in the fields of MBE, MOCVD, sputter coating, CVC, etc.)
- Superconductor substrate heating.
- Electron microscope sample heating.
- Metal evaporation heating.
PBN/PG Composite Heating Elements Packaging
Our PBN/PG Composite Heating Elements are carefully handled during storage and transportation to preserve the quality of our product in its original condition.
25Kg/Bag