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WN1712 Tungsten Nitride Powder / Targets (WN and WN2)

Catalog No.	WN1712
Chemical Formula	WN, WN2, N2W3
Color	Grey
Density	17.8 g/cm3
Crystal Structure	Cubic

Tungsten Nitride (WN2) is an inorganic compound, a nitride of tungsten. Stanford Advanced Materials (SAM) is a leading supplier of Tungsten Nitride Powder / Tungsten Nitride Targets (WN and WN2) with competitive pricing and great lead times.

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WN1712 Tungsten Nitride Powder / Targets (WN and WN2)

Description

Specification

Technical Data Sheet

Tungsten Nitride Powder / Targets (WN and WN2) Description

Tungsten nitride (WN2) is an inorganic compound, a nitride of tungsten. It is a ceramic material. It is electrically conductive. It is a very hard solid material. It has a brown color. It decomposes in water.

Tungsten Nitride Powder / Targets (WN and WN2) Synonyms

tungsten nitride powder, tungsten nitride targets, WN, WN2, tungsten nitride (WN and WN2), tungsten nitride target, WN powder, WN2 powder, WN target, WN2 target, CAS# 37359-53-8, CAS# 12058-38-7.

Tungsten Nitride Powder

Chemical Properties

99% min.

Physical Properties

Targets, granules, and powder

Tungsten Nitride Powder / Targets (WN and WN2) Typical Applications

Tungsten nitride (WN) is another film used for conductive layers or barrier layers within integrated circuit manufacturing. Its use is not as common as pure tungsten films or titanium nitride films but appears to have much promise in the future as geometries shrink. It provides compatibility for applications using barriers in layers of W/WN and WSix / WN.

It is used in microelectronics as contact material, for conductive layers, and barrier layers between silicon and other metals, eg. tungsten or copper. It is less commonly used than titanium nitride or tungsten films.

Tungsten Nitride Powder / Targets (WN and WN2) Specifications

Molecular Weight (g/mol.)	197.847
Density (g/cm3)	17.8
IUPAC Name	azanylidynetungsten
Exact Mass	197.954007
Melting Point (°C)
Boiling Point (°C)
Topological Polar Surface Area	23.8
Heavy Atom Count	2
Complexity	10
RN	12058-38-7
Crystal Structure	Cubic
Color	Grey

Tungsten Nitride Powder / Targets (WN and WN2) Classification

Tungsten Nitride (WN and WN2) Chemical Abstract Service Number:
a) CAS# 37359-53-8
b) CAS# 12058-38-7

Tungsten Nitride Powder / Targets (WN and WN2) Packaging

Bags, drums, and bulk bags

Specification

Molecular Weight (g/mol.)	197.847
Density (g/cm3)	17.8
IUPAC Name	azanylidynetungsten
Exact Mass	197.954007
Melting Point (°C)
Boiling Point (°C)
Topological Polar Surface Area	23.8
Heavy Atom Count	2
Complexity	10
RN	12058-38-7
Crystal Structure	Cubic
Color	Grey

Technical Data Sheet

SDS

Print to PDF

SAFETY DATA SHEET

SECTION 1. IDENTIFICATION

Product Name: Tungsten Nitride (WN)

CAS #: 12058-38-7

Relevant identified uses of the substance: Scientific research and development

Supplier details:

Stanford Advanced Materials

E-mail: sales@samaterials.com

Tel: (949) 407-8904

Address: 23661 Birtcher Dr., Lake Forest, CA 92630 U.S.A.

SECTION 2. HAZARDS IDENTIFICATION

For additional information on toxicity, please refer to Section 11.

SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Formula: WN

Cas Number: 12058-38-7

SECTION 4. FIRST AID MEASURES

ORAL EXPOSURE

If swallowed, wash out mouth with water provided person is

conscious. Call a physician.

INHALATION EXPOSURE

If inhaled, remove to fresh air. If not breathing give

artificial respiration. If breathing is difficult, give oxygen.

DERMAL EXPOSUREIn case of contact, immediately wash skin with soap and copious

amounts of water.

EYE EXPOSURE

In case of contact, immediately flush eyes with copious amounts

of water for at least 15 minutes.

SECTION 5. FIREFIGHTING MEASURES

FLASH POINT

N/A

AUTOIGNITION TEMP

N/A

FLAMMABILITY

N/A

EXTINGUISHING MEDIA

Suitable: Water spray. Carbon dioxide, dry chemical powder, or

appropriate foam.

FIREFIGHTING

Protective Equipment: Wear self-contained breathing apparatus

and protective clothing to prevent contact with skin and eyes.

Specific Hazard(s): Emits toxic fumes under fire conditions.

SECTION 6. ACCIDENTAL RELEASE MEASURES

PROCEDURE(S) OF PERSONAL PRECAUTION(S)

Wear respirator, chemical safety goggles, rubber boots, and

heavy rubber gloves.

METHODS FOR CLEANING UP

Sweep up, place in a bag and hold for waste disposal. Avoid

raising dust. Ventilate area and wash spill site after material

pickup is complete.

SECTION 7. HANDLING AND STORAGE

HANDLING

User Exposure: Avoid inhalation. Avoid contact with eyes, skin,

and clothing. Avoid prolonged or repeated exposure.

STORAGE

Suitable: Keep tightly closed. Store in a cool dry place.

SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

ENGINEERING CONTROLSSafety shower and eye bath. Mechanical exhaust required.

PERSONAL PROTECTIVE EQUIPMENT

Respiratory: Use respirators and components tested and approved

under appropriate government standards such as NIOSH (US) or CEN

(EU). Respiratory protection is not required. Where protection is

desired, use multi-purpose combination (US) or type ABEK (EN

14387) respirator cartridges.

Hand: Compatible chemical-resistant gloves.

Eye: Chemical safety goggles.

GENERAL HYGIENE MEASURES

Wash thoroughly after handling. Wash contaminated clothing before

reuse.

SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Molecular Weight 194.96 AMU

pH N/A

BP/BP Range N/A

MP/MP Range N/A

Freezing Point N/A

Vapor Pressure N/A

Vapor Density N/A

Saturated Vapor Conc. N/A

SG/Density N/A

Bulk Density N/A

Odor Threshold N/A

Volatile% N/A

VOC Content N/A

Water Content N/A

Solvent Content N/A

Evaporation Rate N/A

Viscosity N/A

Surface Tension N/A

Partition Coefficient N/A

Decomposition Temp. N/A

Flash Point N/A

Explosion Limits N/A

Flammability N/A

Autoignition Temp N/A

Refractive Index N/A

Optical Rotation N/A

Miscellaneous Data N/A

Solubility N/A

N/A = not available

SECTION 10. STABILITY AND REACTIVITY

STABILITY

Materials to Avoid: Strong oxidizing agents.HAZARDOUS DECOMPOSITION PRODUCTS

Hazardous Decomposition Products: Nature of decomposition products

not known.

SECTION 11. TOXICOLOGICAL INFORMATION

ROUTE OF EXPOSURE

Skin Contact: May cause skin irritation.

Eye Contact: May cause eye irritation.

Multiple Routes: May be harmful by inhalation, ingestion, or

skin absorption.

SIGNS AND SYMPTOMS OF EXPOSURE

To the best of our knowledge, the chemical, physical, and

toxicological properties have not been thoroughly investigated.

SECTION 12. ECOLOGICAL INFORMATION

GENERAL NOTES

Do not allow material to be released to the environment without official permits.

SECTION 13. DISPOSAL CONSIDERATIONS

APPROPRIATE METHOD OF DISPOSAL OF SUBSTANCE OR PREPARATION

Bury in a landfill site approved for the disposal of chemical and

hazardous wastes. Observe all federal, state, and local

environmental regulations.

SECTION 14. TRANSPORT INFORMATION

DOT

Proper Shipping Name: None

Non-Hazardous for Transport: This substance is

considered to be non-hazardous for transport.

IATA

Non-Hazardous for Air Transport: Non-hazardous for air

transport.

SECTION 15. REGULATORY INFORMATION

UNITED STATES REGULATORY INFORMATION

SARA LISTED: No

CANADA REGULATORY INFORMATION

WHMIS Classification: This product has been classified inaccordance with the hazard criteria of the CPR, and the MSDS

contains all the information required by the CPR.

DSL: Yes

NDSL: No

SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is

believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The

information in this document is based on the present state of our knowledge and is applicable to the

product with regard to appropriate safety precautions. It does not represent any guarantee of the

properties of the product.

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WN1712 Tungsten Nitride Powder / Targets (WN and WN2)

Tungsten Nitride Powder / Targets (WN and WN2) Description

Tungsten Nitride Powder / Targets (WN and WN2) Synonyms

Chemical Properties

Physical Properties

Tungsten Nitride Powder / Targets (WN and WN2) Typical Applications

Tungsten Nitride Powder / Targets (WN and WN2) Specifications

Tungsten Nitride Powder / Targets (WN and WN2) Classification

Tungsten Nitride Powder / Targets (WN and WN2) Packaging

Specification

Technical Data Sheet

SAFETY DATA SHEET

SECTION 1. IDENTIFICATION

SECTION 2. HAZARDS IDENTIFICATION

SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

SECTION 4. FIRST AID MEASURES

SECTION 5. FIREFIGHTING MEASURES

SECTION 6. ACCIDENTAL RELEASE MEASURES

SECTION 7. HANDLING AND STORAGE

SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

SECTION 10. STABILITY AND REACTIVITY

SECTION 11. TOXICOLOGICAL INFORMATION

SECTION 12. ECOLOGICAL INFORMATION

SECTION 13. DISPOSAL CONSIDERATIONS

SECTION 14. TRANSPORT INFORMATION

SECTION 15. REGULATORY INFORMATION

SECTION 16. OTHER INFORMATION

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