IF5320 (Discontinued) 650C Two Zones CSS Furnace for Rapid Thermal Processing OTF-1200X-RTP-II

Furnace Structure & Vacuum Chamber

• Dual Heaters, two temperature controllers, and two-channel gas flowmeters are integrated into a mobile aluminum alloy frame
• The chamber is made of high-purity fused quartz tube
• Quartz tube size: 11" OD/10.8" ID x 9" H
• Carbon fiber felt as thermal insulation
• The vacuum flanges are made of Stainless Steel 316
• Overall dimension: 850(L)×745(W)×1615(H) mm

Vacuum Flanges

• Top Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily
• The bottom flange has one KFD-25 vacuum port with two gas inlets (1/4" pipe required) and needle valves
• The flange is sealed by double silicone o-rings and can achieve maximum vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump
• Precision anti-corrosion digital vacuum gauge is in the standard package

Heater and Sample Holder

• Two shortwave IR lamps as heating elements for fast heating.
• The distance between two heaters is adjustable from 10 - 50 mm
• The heaters are made of stainless steel with a water-cold jacket to reduce heat radiation and allow for fast cooling
• 3" round wafer holder is built-in with the top heater to load the substrate
• One high thermal conductive AlN plate (3"Dia x 0.5mm Thick) is included, which shall be put on the back of the substrate to make it heated uniformly
• One 3" graphite plate can be used alternatively for the AIN plate
• Halogen Light Heater replacement is available at an extra cost

Temperature Controller

• Two precision digital temperature controllers with 30 segments programmable to independently control the top and bottom heaters
• Each controller has a PID auto-tune function to protect heaters from overshooting and an alarm function to avoid overheating and the thermal couple broke
• PC communication interface & software is installed

Working Temperature

• Maximum temperature for each heater: ≤ 650℃
• The maximum temperature difference between two heaters: ≤ 300℃ depends on the spacing between two heaters:

Heating & Cooling Rate

• Heating: < 8℃/s ( heating single heater only )
• Cooling: < 10℃/s (600 - 100℃) Max.

Thermal Couple

• Two K-type thermal couples (exposed) are installed on top and bottom heaters separately

Working Voltage

• 208 - 240VAC, single-phase, 20A air breaker

Power Requirement

• 2200W total (1100W for each heater)

Warranty

• One year limited with lifetime support (Consumable parts such as quartz tubes and heating lamps are not covered by the warranty)

Compliance

• CE Certified