IF5884 (Discontinued) 1500C 8 Channel Tube Furnace GSL-1500X-MGI-8

Furnace Structure

• The furnace consists of 8 tube furnace modules with quartz tube 50 O.D x 40 I.D x 552 L (mm) 
• Each heating module is separated by insulation material with an air cooling layer
• Each heating module's temperature is controlled independently up to 1500°C
• Quick seal flange, vacuum gauge, and flow meter are installed with 8 independent air inlets and outlets on both sides of the furnace, ensuring each channel can be heat treated in a vacuum or atmosphere protection environment.
• Processing 8 samples with different temperatures at compact space

Heating Element

Silicon Carbide

Power

18 KW, 208-240VAC, two phase, 50/60Hz

Working Temp.

• Max. Temp: 1500℃ (<30 mins); 1300 (continuous)
• Heating Rate: ≤10℃/min
• Temp. accuracy: ±1.0℃

Gas system & Flange

• Each channel has a separate intake and outlet system
• KF25 port for vacuum
• On the left, there are 8 G1/4 air intakes, 8 globe valves, and 8 float flowmeters (16-160ml/min) to regulate the intake flow.
• On the right, there are 8 G1/4 air outlets and 4 globe valves
• 8 sets of water-cooled fast stainless steel flange systems
• The flange is equipped with a mechanical pressure gauge
• Quick connecting flange and KF25 port on the front for quick sample access
• The rear flange has an air inlet and an air outlet, which are respectively connected to the air intake and outlet panels on both sides
• Max. Vacuum 10^-2 torr by a mechanical pump and 10^-5 torr by turbopump

Temperature Controller

• 8 channel heating tube is controlled independently by 30 segments programmable temperature controller
• 8 S type Thermal Couples
• PC control software is included, which can control 8 channel heaters by one Laptop

Dimension

1540 L x 780 W x 1260 H mm

Weight

~500 kg

Warranty

• One year limited warranty with lifetime support.
• We reserve the right to upgrade the furnace structure for better performance without notice.

Warning & Notes

• Max. pressure of this furnace is 7.5 PSI (0.5 atm). A pressure regulator on the gas tank to avoid being over-pressured is necessary.
• This furnace also can be modified as a larger CVD furnace system with a proper gas delivery system. Please contact us to discuss your special application.

Certificate

• CE Certified
• NRTL or CSA certification is available at extra cost.