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IF5179 (Discontinued) 1100C Vacuum Chamber Furnace VBF-1200X-H8

Catalog No. IF5179
Item Number VBF-1200X-H8
Working Temperature 1000℃ continuously
Max Working Temp. (℃) 1100℃, ≤30mins
Chamber Size φ240*210mm (7.6L)

Discontinued

1100C Vacuum Chamber Furnace VBF-1200X-H8 is a compact vacuum furnace which equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Stanford Advanced Materials (SAM) has rich experience in manufacturing and supplying high-quality Muffle Furnaces.

Related products: 1250C Small Muffle Furnace KSL-1200X-J, 1200C Small Muffle Furnace with Separated Programmable Controller KSL-1200X-J-F 

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(Discontinued) 1100C Vacuum Chamber Furnace VBF-1200X-H8
(Discontinued) 1100C Vacuum Chamber Furnace VBF-1200X-H8
(Discontinued) 1100C Vacuum Chamber Furnace VBF-1200X-H8
(Discontinued) 1100C Vacuum Chamber Furnace VBF-1200X-H8
Description
Specification

1100C Vacuum Chamber Furnace VBF-1200X-H8 Description

1100C Vacuum Chamber Furnace uses resistance wire as the heating element, a double-layer shell structure, and a 50-stage programmable temperature control, K-type thermocouple. The furnace is made of high-purity alumina fiber material. The maximum temperature can reach 1100 degrees. It can continuously operate at a temperature of 1000 degrees and has a temperature control accuracy of ±1 degrees. The furnace has the advantages of a uniform temperature field, low surface temperature, fast temperature rising and falling, and energy saving.

1100C Vacuum Chamber Furnace VBF-1200X-H8 Specifications

Heating Rate

  • Max. 20℃/ min
  • Recommended. 10℃/ min

Heating Elements 

  • High-quality Ni-Cr-Al resistance wire

Power

  • Voltage: Single-phase 208 - 240 VAC / 50/60Hz
  • 4 KW max. 
  • Note: Power cable included but without the plug. Please install a plug on your own

Working Temperature

  • <= 1000 ℃ continuously
  • Max. 1100 ℃, < 30 minutes
  • Temperature Uniformity: +/- 1℃
  • Note: <= 1150 ℃ continuously is available upon request by GE214 grade quartz tube at the extra cost

Quartz Tube & Effective Heating

  • Tube size: 8" O.D. x 7.5" I.D x 13.4" L. 
  • Heating area: 7.5" ID x 8.5" Depth (7.6Liter)
  • Uniform Temperature zone:  6"Dia x 3.5" depth in center position within +/- 5℃
  • The quartz tube is replaceable.

Gas Inlet and Outlet & Water cooling

  • A valved gas purge inlet on the left side of the furnace (1/4" hose adapter)
  • Inert gas can be introduced into the chamber through the inlet for purging.
  • If continuous gas flow is required, refer to the additional gas inlets and thermocouple probes below.
  • A water-cooling jacket inside the flange to protect the vacuum-sealing O-ring. The inlet and outlet located on the left side of the furnace are for connection to the chiller via two connectors with a diameter of 12 mm. Polyurethane pipe (requires 16 l/min water flow).
  • Heating temperatures above 500℃ require a chiller (thermal block is placed)

Temperature Controller

  • NRTL-certified digital temperature controller is included.
  • Proportional-integral-derivative control (PID control) and self-tuning function
  • 30-segment programming with ramp, cool down and dwell steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/-1℃ temperature control accuracy
  • Contains default DB9 PC communication port for connecting to PC
  • Eurotherm Temperature Controller is available at extra cost and has an accuracy of +/-0.1℃.

Options

  • The sample holder is not included with the furnace.
  • You may order quartz wafer boat to anneal wafer up to 6"
  • Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block.
  • 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g., Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.

Warranty

  • One-year limited warranty with lifetime support
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.

 

Compliance

  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.
  • Patten Number: ZL-2011-2-0102249.4 SINCE 2011-5-19

1100C Vacuum Chamber Furnace VBF-1200X-H8 Applications

1100C Vacuum Chamber Furnace is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature of up to 1100℃. It also can be used as a vacuum brazing furnace.

1100C Vacuum Chamber Furnace VBF-1200X-H8 Packaging

Our 1100C Vacuum Chamber Furnace VBF-1200X-H8 is carefully handled during storage and transportation to preserve the quality of our product in its original condition.

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