1100C Vacuum Chamber Furnace VBF-1200X-H8 | Stanford Advanced Materials

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IF5179 (Discontinued) 1100C Vacuum Chamber Furnace VBF-1200X-H8

Catalog No.	IF5179
Item Number	VBF-1200X-H8
Working Temperature	1000℃ continuously
Max Working Temp. (℃)	1100℃, ≤30mins
Chamber Size	φ240*210mm (7.6L)

Discontinued

1100C Vacuum Chamber Furnace VBF-1200X-H8 is a compact vacuum furnace which equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Stanford Advanced Materials (SAM) has rich experience in manufacturing and supplying high-quality Muffle Furnaces.

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Description

Specification

1100C Vacuum Chamber Furnace VBF-1200X-H8 Description

1100C Vacuum Chamber Furnace uses resistance wire as the heating element, a double-layer shell structure, and a 50-stage programmable temperature control, K-type thermocouple. The furnace is made of high-purity alumina fiber material. The maximum temperature can reach 1100 degrees. It can continuously operate at a temperature of 1000 degrees and has a temperature control accuracy of ±1 degrees. The furnace has the advantages of a uniform temperature field, low surface temperature, fast temperature rising and falling, and energy saving.

1100C Vacuum Chamber Furnace VBF-1200X-H8 Specifications

Heating Rate	Max. 20℃/ min Recommended. 10℃/ min
Heating Elements	High-quality Ni-Cr-Al resistance wire
Power	Voltage: Single-phase 208 - 240 VAC / 50/60Hz 4 KW max. Note: Power cable included but without the plug. Please install a plug on your own
Working Temperature	<= 1000 ℃ continuously Max. 1100 ℃, < 30 minutes Temperature Uniformity: +/- 1℃ Note: <= 1150 ℃ continuously is available upon request by GE214 grade quartz tube at the extra cost
Quartz Tube & Effective Heating	Tube size: 8" O.D. x 7.5" I.D x 13.4" L. Heating area: 7.5" ID x 8.5" Depth (7.6Liter) Uniform Temperature zone: 6"Dia x 3.5" depth in center position within +/- 5℃ The quartz tube is replaceable.
Gas Inlet and Outlet & Water cooling	A valved gas purge inlet on the left side of the furnace (1/4" hose adapter) Inert gas can be introduced into the chamber through the inlet for purging. If continuous gas flow is required, refer to the additional gas inlets and thermocouple probes below. A water-cooling jacket inside the flange to protect the vacuum-sealing O-ring. The inlet and outlet located on the left side of the furnace are for connection to the chiller via two connectors with a diameter of 12 mm. Polyurethane pipe (requires 16 l/min water flow). Heating temperatures above 500℃ require a chiller (thermal block is placed)
Temperature Controller	NRTL-certified digital temperature controller is included. Proportional-integral-derivative control (PID control) and self-tuning function 30-segment programming with ramp, cool down and dwell steps Built-in over-temperature alarm and thermocouple failure alarm +/-1℃ temperature control accuracy Contains default DB9 PC communication port for connecting to PC Eurotherm Temperature Controller is available at extra cost and has an accuracy of +/-0.1℃.
Options	The sample holder is not included with the furnace. You may order quartz wafer boat to anneal wafer up to 6" Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block. A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g., Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
Warranty	One-year limited warranty with lifetime support ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.
Compliance	CE Certified NRTL or CSA certification is available upon request at extra cost. Patten Number: ZL-2011-2-0102249.4 SINCE 2011-5-19

1100C Vacuum Chamber Furnace VBF-1200X-H8 Applications

1100C Vacuum Chamber Furnace is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature of up to 1100℃. It also can be used as a vacuum brazing furnace.

1100C Vacuum Chamber Furnace VBF-1200X-H8 Packaging

Our 1100C Vacuum Chamber Furnace VBF-1200X-H8 is carefully handled during storage and transportation to preserve the quality of our product in its original condition.

Specification

Heating Rate	Max. 20℃/ min Recommended. 10℃/ min
Heating Elements	High-quality Ni-Cr-Al resistance wire
Power	Voltage: Single-phase 208 - 240 VAC / 50/60Hz 4 KW max. Note: Power cable included but without the plug. Please install a plug on your own
Working Temperature	<= 1000 ℃ continuously Max. 1100 ℃, < 30 minutes Temperature Uniformity: +/- 1℃ Note: <= 1150 ℃ continuously is available upon request by GE214 grade quartz tube at the extra cost
Quartz Tube & Effective Heating	Tube size: 8" O.D. x 7.5" I.D x 13.4" L. Heating area: 7.5" ID x 8.5" Depth (7.6Liter) Uniform Temperature zone: 6"Dia x 3.5" depth in center position within +/- 5℃ The quartz tube is replaceable.
Gas Inlet and Outlet & Water cooling	A valved gas purge inlet on the left side of the furnace (1/4" hose adapter) Inert gas can be introduced into the chamber through the inlet for purging. If continuous gas flow is required, refer to the additional gas inlets and thermocouple probes below. A water-cooling jacket inside the flange to protect the vacuum-sealing O-ring. The inlet and outlet located on the left side of the furnace are for connection to the chiller via two connectors with a diameter of 12 mm. Polyurethane pipe (requires 16 l/min water flow). Heating temperatures above 500℃ require a chiller (thermal block is placed)
Temperature Controller	NRTL-certified digital temperature controller is included. Proportional-integral-derivative control (PID control) and self-tuning function 30-segment programming with ramp, cool down and dwell steps Built-in over-temperature alarm and thermocouple failure alarm +/-1℃ temperature control accuracy Contains default DB9 PC communication port for connecting to PC Eurotherm Temperature Controller is available at extra cost and has an accuracy of +/-0.1℃.
Options	The sample holder is not included with the furnace. You may order quartz wafer boat to anneal wafer up to 6" Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block. A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g., Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
Warranty	One-year limited warranty with lifetime support ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.
Compliance	CE Certified NRTL or CSA certification is available upon request at extra cost. Patten Number: ZL-2011-2-0102249.4 SINCE 2011-5-19