1100C Vacuum Chamber Furnace VBF-1200X-H8 Description
1100C Vacuum Chamber Furnace uses resistance wire as the heating element, a double-layer shell structure, and a 50-stage programmable temperature control, K-type thermocouple. The furnace is made of high-purity alumina fiber material. The maximum temperature can reach 1100 degrees. It can continuously operate at a temperature of 1000 degrees and has a temperature control accuracy of ±1 degrees. The furnace has the advantages of a uniform temperature field, low surface temperature, fast temperature rising and falling, and energy saving.
1100C Vacuum Chamber Furnace VBF-1200X-H8 Specifications
|
Heating Rate
|
- Max. 20℃/ min
- Recommended. 10℃/ min
|
|
Heating Elements
|
- High-quality Ni-Cr-Al resistance wire
|
|
Power
|
- Voltage: Single-phase 208 - 240 VAC / 50/60Hz
- 4 KW max.
- Note: Power cable included but without the plug. Please install a plug on your own
|
|
Working Temperature
|
- <= 1000 ℃ continuously
- Max. 1100 ℃, < 30 minutes
- Temperature Uniformity: +/- 1℃
- Note: <= 1150 ℃ continuously is available upon request by GE214 grade quartz tube at the extra cost
|
|
Quartz Tube & Effective Heating
|
- Tube size: 8" O.D. x 7.5" I.D x 13.4" L.
- Heating area: 7.5" ID x 8.5" Depth (7.6Liter)
- Uniform Temperature zone: 6"Dia x 3.5" depth in center position within +/- 5℃
- The quartz tube is replaceable.
|
|
Gas Inlet and Outlet & Water cooling
|
- A valved gas purge inlet on the left side of the furnace (1/4" hose adapter)
- Inert gas can be introduced into the chamber through the inlet for purging.
- If continuous gas flow is required, refer to the additional gas inlets and thermocouple probes below.
- A water-cooling jacket inside the flange to protect the vacuum-sealing O-ring. The inlet and outlet located on the left side of the furnace are for connection to the chiller via two connectors with a diameter of 12 mm. Polyurethane pipe (requires 16 l/min water flow).
- Heating temperatures above 500℃ require a chiller (thermal block is placed)
|
|
Temperature Controller
|
- NRTL-certified digital temperature controller is included.
- Proportional-integral-derivative control (PID control) and self-tuning function
- 30-segment programming with ramp, cool down and dwell steps
- Built-in over-temperature alarm and thermocouple failure alarm
- +/-1℃ temperature control accuracy
- Contains default DB9 PC communication port for connecting to PC
- Eurotherm Temperature Controller is available at extra cost and has an accuracy of +/-0.1℃.
|
|
Options
|
- The sample holder is not included with the furnace.
- You may order quartz wafer boat to anneal wafer up to 6"
- Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block.
- A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g., Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
|
|
Warranty
|
- One-year limited warranty with lifetime support
- ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of SAM One Year Limited Warranty.
|
|
Compliance
|
- CE Certified
- NRTL or CSA certification is available upon request at extra cost.
- Patten Number: ZL-2011-2-0102249.4 SINCE 2011-5-19
|
1100C Vacuum Chamber Furnace VBF-1200X-H8 Applications
1100C Vacuum Chamber Furnace is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature of up to 1100℃. It also can be used as a vacuum brazing furnace.
1100C Vacuum Chamber Furnace VBF-1200X-H8 Packaging
Our 1100C Vacuum Chamber Furnace VBF-1200X-H8 is carefully handled during storage and transportation to preserve the quality of our product in its original condition.
