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AL3258 Electrostatic Chuck (Al2O3, AlN, Sapphire)

Catalog No. AL3258
Material Al2O3, AlN, Sapphire
Size Designed for φ200/300mm Equipment
Purity ≥99.9%

Electrostatic Chuck features high purity, high plasma durability, good chucking/de-chucking response, and high-temperature and low-temperature application. Stanford Advanced Materials (SAM) has rich experience in manufacturing and supplying high-quality alumina products.

Related products: Aluminum Oxide Sapphire Crystal Substrate, Sapphire windows, Sapphire Wafer, Aluminum Nitride Custom Machined Parts

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