ST0982 Zirconium Sputtering Target (Zr Sputtering Target)

SECTION 1. IDENTIFICATION

Product Name: Zirconium Sputtering Target

CAS #: 7440-67-7

Relevant identified uses of the substance: Scientific research and development

Supplier details:

Stanford Advanced Materials

E-mail: sales@samaterials.com

Tel: (949) 407-8904

Address: 23661 Birtcher Dr., Lake Forest, CA 92630 U.S.A.

SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture

Classification according to Regulation (EC) No 1272/2008

The substance is not classified as hazardous to health or the environment according to the CLP

regulation.

Classification according to Directive 67/548/EEC or Directive 1999/45/EC

N/A

Information concerning particular hazards for human and environment:

No data available

Hazards not otherwise classified

No data available

Label elements

Labelling according to Regulation (EC) No 1272/2008

N/A

Hazard pictograms

N/A

Signal word

N/A

Hazard statements

N/A

WHMIS classificationNot controlled

Classification system

HMIS ratings (scale 0-4)

(Hazardous Materials Identification System)

HEALTH

FIRE

REACTIVITY

0

0

0

Health (acute effects) = 0

Flammability = 0

Physical Hazard = 0

Other hazards

Results of PBT and vPvB assessment

PBT: N/A

vPvB: N/A

SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances

CAS No. / Substance Name:

7440-67-7 Zirconium

Identification number(s):

EC number: 231-176-9

SECTION 4. FIRST AID MEASURES

Description of first aid measures

General information

No special measures required.

If inhaled:

Seek medical treatment in case of complaints.

In case of skin contact:

Generally the product does not irritate the skin.

In case of eye contact:

Rinse opened eye for several minutes under running water. If symptoms persist, consult a doctor.

If swallowed:

If symptoms persist consult doctor.

Information for doctor

Most important symptoms and effects, both acute and delayed

No data available

Indication of any immediate medical attention and special treatment needed

No data available

SECTION 5. FIREFIGHTING MEASURES

Extinguishing media

Suitable extinguishing agents

Special powder for metal fires. Do not use water.For safety reasons unsuitable extinguishing agents

Water

Special hazards arising from the substance or mixture

If this product is involved in a fire, the following can be released:

Zirconium oxide

Advice for firefighters

Protective equipment:

No special measures required.

SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures

Not required.

Environmental precautions:

Do not allow material to be released to the environment without official permits.

Do not allow product to enter drains, sewage systems, or other water courses.

Do not allow material to penetrate the ground or soil.

Methods and materials for containment and cleanup:

Pick up mechanically.

Prevention of secondary hazards:

No special measures required.

Reference to other sections

See Section 7 for information on safe handling

See Section 8 for information on personal protection equipment.

See Section 13 for disposal information.

SECTION 7. HANDLING AND STORAGE

Handling

Precautions for safe handling

Keep container tightly sealed.

Store in cool, dry place in tightly closed containers.

Information about protection against explosions and fires:

No special measures required.

Conditions for safe storage, including any incompatibilities

Requirements to be met by storerooms and receptacles:

No special requirements.

Information about storage in one common storage facility:

No data available

Further information about storage conditions:

Keep container tightly sealed.

Store in cool, dry conditions in well-sealed containers.

Specific end use(s)

No data available

SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:

No further data; see section 7.

Control parametersComponents with limit values that require monitoring at the workplace:

7440-67-7 Zirconium (100.0%)

PEL (USA) Long-term value: 5 mg/m

3

as Zr

REL (USA) Short-term value: 10 mg/m

3

Long-term value: 5 mg/m

3

as Zr

TLV (USA) Short-term value: 10 mg/m

3

Long-term value: 5 mg/m

3

as Zr

EL (Canada) Short-term value: 10 mg/m

3

Long-term value: 5 mg/m

3

as Zr

EV (Canada) Short-term value: 10 mg/m

3

Long-term value: 5 mg/m

3

as zirconium

Additional information: No data

Exposure controls

Personal protective equipment

Follow typical protective and hygienic practices for handling chemicals.

Maintain an ergonomically appropriate working environment.

Breathing equipment: Not required.

Protection of hands: Not required.

Penetration time of glove material (in minutes)

No data available

Eye protection: Safety glasses

Body protection: Protective work clothing.

SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties

Appearance:

Form: Solid in various forms

Color: Grey to silver

Odor: Odorless

Odor threshold: No data available.

pH: N/A

Melting point/Melting range: 1855 °C (3371 °F)

Boiling point/Boiling range: 3580 °C (6476 °F)

Sublimation temperature / start: No data available

Flammability (solid, gas): No data available.

Ignition temperature: No data available

Decomposition temperature: No data available

Autoignition: No data available.

Danger of explosion: No data available.

Explosion limits:

Lower: No data available

Upper: No data available

Vapor pressure: N/A

Density at 20 °C (68 °F): 6.506 g/cm

3

(54.293 lbs/gal)

Relative density: No data available.

Vapor density: N/A

Evaporation rate: N/A

Solubility in Water (H

2

O): SolublePartition coefficient (n-octanol/water): No data available.

Viscosity:

Dynamic: N/A

Kinematic: N/A

Other information

No data available

SECTION 10. STABILITY AND REACTIVITY

Reactivity

No data available

Chemical stability

Stable under recommended storage conditions.

Thermal decomposition / conditions to be avoided:

Decomposition will not occur if used and stored according to specifications.

Possibility of hazardous reactions

No dangerous reactions known

Conditions to avoid

No data available

Incompatible materials:

No data available

Hazardous decomposition products:

Zirconium oxide

SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects

Acute toxicity: No effects known.

LD/LC50 values that are relevant for classification: No data

Skin irritation or corrosion: No irritant effect.

Eye irritation or corrosion: No irritant effect.

Sensitization: No sensitizing effects known.

Germ cell mutagenicity: No effects known.

Carcinogenicity:

ACGIH A4: Not classifiable as a human carcinogen: Inadequate data on which to classify the agent in

terms of its carcinogenicity in humans and/or animals.

Reproductive toxicity: No effects known.

Specific target organ system toxicity - repeated exposure: No effects known.

Specific target organ system toxicity - single exposure: No effects known.

Aspiration hazard: No effects known.

Subacute to chronic toxicity:

The Registry of Toxic Effects of Chemical Substances (RTECS) contains multiple dose toxicity data for

this substance.

Additional toxicological information:

To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.

SECTION 12. ECOLOGICAL INFORMATION

Toxicity

Aquatic toxicity:No data available

Persistence and degradability

No data available

Bioaccumulative potential

No data available

Mobility in soil

No data available

Additional ecological information:

Do not allow material to be released to the environment without official permits.

Do not allow undiluted product or large quantities to reach groundwater, water courses, or sewage

systems.

Avoid transfer into the environment.

Results of PBT and vPvB assessment

PBT: N/A

vPvB: N/A

Other adverse effects

No data available

SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods

Recommendation

Consult official regulations to ensure proper disposal.

Uncleaned packagings:

Recommendation:

Disposal must be made according to official regulations.

Recommended cleansing agent:

Water, if necessary with cleansing agents.

SECTION 14. TRANSPORT INFORMATION

UN-Number

DOT, ADN, IMDG, IATA

N/A

UN proper shipping name

DOT, ADN, IMDG, IATA

N/A

Transport hazard class(es)

DOT, ADR, ADN, IMDG, IATA

Class

N/A

Packing group

DOT, IMDG, IATA

N/A

Environmental hazards:

N/A

Special precautions for user

N/A

Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code

N/A

Transport/Additional information:DOT

Marine Pollutant (DOT):

No

SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture

National regulations

All components of this product are listed in the U.S. Environmental Protection Agency Toxic

Substances Control Act Chemical substance Inventory.

All components of this product are listed on the Canadian Domestic Substances List (DSL).

SARA Section 313 (specific toxic chemical listings)

Substance is not listed.

California Proposition 65

Prop 65 - Chemicals known to cause cancer

Substance is not listed.

Prop 65 - Developmental toxicity

Substance is not listed.

Prop 65 - Developmental toxicity, female

Substance is not listed.

Prop 65 - Developmental toxicity, male

Substance is not listed.

Information about limitation of use:

For use only by technically qualified individuals

Other regulations, limitations and prohibitive regulations

Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.

Substance is not listed.

The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No

1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.

Substance is not listed.

Annex XIV of the REACH Regulations (requiring Authorisation for use)

Substance is not listed.

REACH - Pre-registered substances

Substance is listed.

Chemical safety assessment:

A Chemical Safety Assessment has not been carried out.

SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is

believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The

information in this document is based on the present state of our knowledge and is applicable to the

product with regard to appropriate safety precautions. It does not represent any guarantee of the

properties of the product.